Backside illuminated AlGaN-on-Si UV detectors integrated by high density flip-chip bonding

Malinowski, PawelPawelMalinowskiDuboz, Jean-YvesJean-YvesDubozDe Moor, PietPietDe MoorJohn, JoachimJoachimJohnMinoglou, KikiKikiMinoglouSrivastava, PuneetPuneetSrivastavaAbdul, HameedHameedAbdulPatel, ManojkumarManojkumarPatelOsman, HarisHarisOsmanSemond, FabriceFabriceSemondFrayssinet, EricEricFrayssinetHochedez, Jean-FrancoisJean-FrancoisHochedezGiordanengo, BorisBorisGiordanengoVan Hoof, ChrisChrisVan HoofMertens, RobertRobertMertens2021-10-192021-10-1920111610-1634https://imec-publications.be/handle/20.500.12860/19364Backside illuminated AlGaN-on-Si UV detectors integrated by high density flip-chip bondingJournal article