Weibull slope and voltage acceleration of ultra-thin (1.1-1.14 nm EOT) oxynitrides

O'Connor, R.R.O'ConnorDegraeve, RobinRobinDegraeveKaczer, BenBenKaczerVeloso, AnabelaAnabelaVelosoHughes, G.G.Hughes2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9354Weibull slope and voltage acceleration of ultra-thin (1.1-1.14 nm EOT) oxynitridesJournal article