Huynh Bao, TrongTrongHuynh BaoSakhare, SushilSushilSakhareYakimets, DmitryDmitryYakimetsRyckaert, JulienJulienRyckaertThean, AaronAaronTheanMercha, AbdelkarimAbdelkarimMerchaVerkest, DiederikDiederikVerkestWambacq, PietPietWambacq2021-10-232021-10-2320160018-9383https://imec-publications.be/handle/20.500.12860/26761A comprehensive benchmark and optimization of 5-nm lateral and vertical GAA 6T-SRAMsJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7358115