Diamond electrical probes with sub-nanometer spatial resolution for advanced nanoelectronics device characterization

Hantschel, ThomasThomasHantschelYeghoyan, TaguhiTaguhiYeghoyanParedis, KristofKristofParedisSchulze, AndreasAndreasSchulzeVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26692Diamond electrical probes with sub-nanometer spatial resolution for advanced nanoelectronics device characterizationMeeting abstract