Vandervorst, WilfriedWilfriedVandervorstClarysse, TrudoTrudoClarysseTrenkler, ThomasThomasTrenklerHantschel, ThomasThomasHantschelEyben, PierrePierreEybenHaegeman, BartBartHaegemanStephenson, RobertRobertStephensonDe Wolf, PeterPeterDe Wolf2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3962Probing semiconductor devices on the nanometer schaleProceedings paper