Nitrogen analysis in high-k stack layers: a challenge

Conard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstDe Witte, HildeHildeDe WitteVan Elshocht, SvenSvenVan Elshocht2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8716Nitrogen analysis in high-k stack layers: a challengeJournal article