Ohtani, RyotaRyotaOhtaniYamamoto, TakashiTakashiYamamotoJanssens, StoffelStoffelJanssensYamasaki, SatoshiSatoshiYamasakiKoizumi, SatoshiSatoshiKoizumi2021-10-222021-10-2220140003-6951https://imec-publications.be/handle/20.500.12860/24339Large improvement of phosphorus incorportion efficiency in n-type chemical vapor deposition of diamondJournal article