Ellipsometric investigation of nitrogen doped diamond thin films grown in microwave CH4/H2/N2 plasma enhanced chemical vapor deposition

Ficek, MateuszMateuszFicekSankaran, KamatchiKamatchiSankaranRyl, JacekJacekRylBogdanowicz, RobertRobertBogdanowiczLin, I-NanI-NanLinHaenen, KenKenHaenenDarowicki, KazimierzKazimierzDarowicki2021-10-232021-10-2320160003-6951https://imec-publications.be/handle/20.500.12860/26619Ellipsometric investigation of nitrogen doped diamond thin films grown in microwave CH4/H2/N2 plasma enhanced chemical vapor depositionJournal article10.1063/1.4953779http://scitation.aip.org/content/aip/journal/apl/108/24/10.1063/1.4953779