De Gendt, StefanStefanDe GendtKnotter, MartinMartinKnotterKenis, KarineKarineKenisDepas, MichelMichelDepasMeuris, MarcMarcMeurisMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2490Impact of organic contamination on gate oxide integrityProceedings paper