Design, fabrication and testing of an opto-mechanical ultrasound sensor based on a sensitive silicon photonic waveguide

Westerveld, WouterWouterWesterveldMahmud Ul Hasan, Hasan MDHasan MDMahmud Ul HasanRottenberg, XavierXavierRottenbergSeveri, SimoneSimoneSeveriRochus, VeroniqueVeroniqueRochus2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34439Design, fabrication and testing of an opto-mechanical ultrasound sensor based on a sensitive silicon photonic waveguideProceedings paper