High-throughput temporal ALD Al2O3 passivation as rear surface passivation for industrial local Al BSF Si solar cells

Vermang, BartBartVermangGoverde, HansHansGoverdeRothschild, AudeAudeRothschildJohn, JoachimJoachimJohnPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20072High-throughput temporal ALD Al2O3 passivation as rear surface passivation for industrial local Al BSF Si solar cellsProceedings paper