Frank, M.M.M.M.FrankDörmann, S.S.DörmannChabal, Y.J.Y.J.ChabalSayan, S.S.SayanGarfunkel, E.E.GarfunkelWilk, G.D.G.D.WilkGreen, M.L.M.L.GreenDelabie, AnneliesAnneliesDelabieBrijs, BertBertBrijs2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7579Gate oxide atomic layer deposition studied by in situ infrared spectroscopyOral presentation