Vega Gonzalez, VictorVictorVega GonzalezPuliyalil, HarinarayananHarinarayananPuliyalilVersluijs, JankoJankoVersluijsLesniewska, AlicjaAlicjaLesniewskaVarela Pedreira, OlallaOlallaVarela PedreiraBaert, RogierRogierBaertPaolillo, SaraSaraPaolilloDecoster, StefanStefanDecosterSchleicher, FilipFilipSchleicherMontero Alvarez, DanielDanielMontero AlvarezBekaert, JoostJoostBekaertKesters, ElsElsKestersLe, Quoc ToanQuoc ToanLeLorant, ChristopheChristopheLorantTeugels, LieveLieveTeugelsHeylen, NancyNancyHeylenJourdan, NicolasNicolasJourdanEl-Mekki, ZaidZaidEl-Mekkivan der Veen, MarleenMarleenvan der VeenCiofi, IvanIvanCiofiBriggs, BasoeneBasoeneBriggsHeijlen, JeroenJeroenHeijlenDupas, LucLucDupasDe Wachter, BartBartDe WachterVancoille, EricEricVancoilleWebers, TomasTomasWebersVats, HemantHemantVatsRynders, LucLucRyndersCupak, MiroslavMiroslavCupakLee, Jae UkJae UkLeeDrissi, YoussefYoussefDrissiHalipre, LucLucHalipreCharley, Anne-LaureAnne-LaureCharleyVerdonck, PatrickPatrickVerdonckWitters, ThomasThomasWittersVan Gompel, SanderSanderVan GompelKimura, YosukeYosukeKimuraDemonie, IngridIngridDemonieLazzarino, FredericFredericLazzarinoErcken, MoniqueMoniqueErckenKim, Ryan Ryoung hanRyan Ryoung hanKimTrivkovic, DarkoDarkoTrivkovicCroes, KristofKristofCroesLeray, PhilippePhilippeLerayJaysankar, ManojManojJaysankarWilson, ChrisChrisWilsonMurdoch, GayleGayleMurdochTokei, ZsoltZsoltTokei2021-12-162021-12-062021-12-162021-12-1620202380-9248WOS:000717011600197https://imec-publications.be/handle/20.500.12860/38538Supervia Process Integration and Reliability Compared to Stacked Vias Using Barrierless RutheniumProceedings paper10.1109/IEDM13553.2020.9372096978-1-7281-8888-1WOS:000717011600197