Shear-Rolling Process for Unidirectionally and Perpendicularly Oriented Sub-10-nm Block Copolymer Patterns on the 4 in Scale

Oh, JinwooJinwooOhShin, MinkyungMinkyungShinKim, In SooIn SooKimSuh, Hyo SeonHyo SeonSuhKim, YongJooYongJooKimKim, Jai KyeongJai KyeongKimBang, JoonaJoonaBangYeom, BongjunBongjunYeomSon, Jeong GonJeong GonSon2023-01-172021-11-022023-01-1720211936-0851WOS:000656994100055https://imec-publications.be/handle/20.500.12860/37900Shear-Rolling Process for Unidirectionally and Perpendicularly Oriented Sub-10-nm Block Copolymer Patterns on the 4 in ScaleJournal article10.1021/acsnano.1c00358WOS:000656994100055THIN-FILMSTOP-COATORIENTATIONALIGNMENTDIBLOCKNANOLITHOGRAPHYMICRODOMAINSGRAPHOEPITAXYLITHOGRAPHYFABRICATIONMEDLINE:33979144