Thermal recovery process of electron irradiated Si1-xCx source/drain n-MOSFETs

Takakura, KenichiroKenichiroTakakuraMori, MasatoMasatoMoriYoneoka, MasashiMasashiYoneokaTsunoda, IsaoIsaoTsunodaNakashima, ToshiyukiToshiyukiNakashimaSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-222021-10-2220151610-1634https://imec-publications.be/handle/20.500.12860/25977Thermal recovery process of electron irradiated Si1-xCx source/drain n-MOSFETsJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssc.201510088/abstract