Sagi, K.V.K.V.SagiTeugels, LieveLieveTeugelsvan der Veen, MarleenMarleenvan der VeenStruyf, HerbertHerbertStruyfBabu, S.V.S.V.Babu2021-10-242021-10-2420172162-8769https://imec-publications.be/handle/20.500.12860/29349Chemical mechanical polishing and planarization of Mn-based barrier/Ru liner films in Cu interconnects for advanced metallization nodesJournal articlehttp://jss.ecsdl.org/content/6/5/P259.abstract