Holsteyns, FrankFrankHolsteynsFyen, WimWimFyenLauerhaas, JeffJeffLauerhaasArnauts, SophiaSophiaArnautsMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5920Single wafer dryingProceedings paper