Bellanger, PierrePierreBellangerCenteno Brito, MiguelMiguelCenteno BritoPera, David M.David M.PeraCosta, IvoIvoCostaGaspar, GuilhermeGuilhermeGasparMartini, RobertoRobertoMartiniDebucquoy, MaartenMaartenDebucquoySerra, Joao M.Joao M.Serra2021-10-222021-10-2220142156-3381https://imec-publications.be/handle/20.500.12860/23531New stress activation method for kerfless silicon wafering using Ag/Al and epoxy stress-inducing layersJournal articlehttp://ieeexplore.ieee.org/xpl/abstractAuthors.jsp?reload=true&arnumber=6862848