Plasma damage and restoration of CVD low-k materials

Smirnov, EvgenyEvgenySmirnovFerchichi, AbdelkarimAbdelkarimFerchichiZhao, LarryLarryZhaoBaklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16248Plasma damage and restoration of CVD low-k materialsMeeting abstract