Extracting active dopant profile information from carrier illmination power curves

Dortu, FabianFabianDortuClarysse, TrudoTrudoClarysseLoo, RogerRogerLooVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10401Extracting active dopant profile information from carrier illmination power curvesProceedings paper