Poyai, AmpornAmpornPoyaiSimoen, EddyEddySimoenClaeys, CorCorClaeysHuber, A.A.HuberGräf, D.D.GräfGaubas, EugenijusEugenijusGaubas2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6741Impact of state-of-the-art Cz substrates on the current-voltage characteristics of shallow p-n junctionsProceedings paper