Liyanage, LuckshithaLuckshithaLiyanageCott, DaireDaireCottDelabie, AnneliesAnneliesDelabieVan Elshocht, SvenSvenVan ElshochtBao, ZhenanZhenanBaoWong, PhilipPhilipWong2021-10-212021-10-2120130957-4484https://imec-publications.be/handle/20.500.12860/22714Atomic layer deposition of high-k dDielectrics on single-walled carbon nanotubes: a Raman studyJournal article