Enhancing the quality of low temperature SiO2 by atomic hydrogen exposure for excellent NBTI reliability

Franco, JacopoJacopoFrancode Marneffe, Jean-FrancoisJean-Francoisde MarneffeVandooren, AnneAnneVandoorenKimura, YosukeYosukeKimuraNyns, LauraLauraNynsWu, ZhichengZhichengWuEl-Sayed, Al-MoatasemAl-MoatasemEl-SayedJech, MarkusMarkusJechWaldhoer, DominicDominicWaldhoerClaes, DieterDieterClaesArimura, HiroakiHiroakiArimuraRagnarsson, Lars-AkeLars-AkeRagnarssonAfanas'ev, ValeriValeriAfanas'evStesmans, AndreAndreStesmansHoriguchi, NaotoNaotoHoriguchiLinten, DimitriDimitriLintenGrasser, TiborTiborGrasserKaczer, BenBenKaczer2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35135Enhancing the quality of low temperature SiO2 by atomic hydrogen exposure for excellent NBTI reliabilityMeeting abstracthttps://www.ieeesisc.org/programs/2020_SISC_technical_program.pdf