Raghavan, PraveenPraveenRaghavanFirouzi, FarshadFarshadFirouziMatti, L.L.MattiDebacker, PeterPeterDebackerBaert, RogierRogierBaertSherazi, YasserYasserSheraziTrivkovic, DarkoDarkoTrivkovicGerousis, V.V.GerousisDusa, MirceaMirceaDusaRyckaert, JulienJulienRyckaertTokei, ZsoltZsoltTokeiVerkest, DiederikDiederikVerkestMcIntyre, GregGregMcIntyreRonse, KurtKurtRonse2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27179Metal stack optimization for low-power and high-density for N7-N5Proceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2510926