Specific features of multi-gate MOSFET threshold voltage and subthreshold slope behavior at high temperatures

Kilchytska, ValeriaValeriaKilchytskaCollaert, NadineNadineCollaertJurczak, GosiaGosiaJurczakFlandre, DenisDenisFlandre2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12395Specific features of multi-gate MOSFET threshold voltage and subthreshold slope behavior at high temperaturesJournal article