Esch, HeleenHeleenEschHuyberechts, GuidoGuidoHuyberechtsMertens, RobertRobertMertensMaes, GuidoGuidoMaesManca, JeanJeanMancaDe Ceuninck, WardWardDe CeuninckDe Schepper, LucLucDe Schepper2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2569The stability of platinum heater and temperature sensing elements for silicon integrated tin oxide gas sensorsProceedings paper