Evaluation of transmission line model structures for silicide-to-silicon specific contact resistance extraction

Stavitski, NatalieNatalieStavitskiVan Dal, Mark J.H.Mark J.H.Van DalLauwers, AnneAnneLauwersVrancken, ChristaChristaVranckenKovalgin, Alexey Y.Alexey Y.KovalginWolters, Rob A.M.Rob A.M.Wolters2021-10-172021-10-1720080018-9383https://imec-publications.be/handle/20.500.12860/14513Evaluation of transmission line model structures for silicide-to-silicon specific contact resistance extractionJournal article