Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range

Abbasirad, NajmehNajmehAbbasiradSaadeh, QaisQaisSaadehCiesielski, RichardRichardCiesielskiGottwald, AlexanderAlexanderGottwaldPhilipsen, VickyVickyPhilipsenMakhotkin, IgorIgorMakhotkinSokolov, AndreyAndreySokolovKolbe, MichaelMichaelKolbeScholze, FrankFrankScholzeSoltwisch, VictorVictorSoltwisch2024-04-172023-07-282024-04-172023978-1-5106-6099-10277-786XWOS:001022962000098https://imec-publications.be/handle/20.500.12860/42242Precise optical constant determination in the soft X-ray, EUV, and VUV spectral rangeProceedings paper10.1117/12.2659369978-1-5106-6100-4WOS:001022962000098