Tensely strained silicon on SiGe produced by strain transfer

Buca, D.D.BucaHolländer, B.B.HolländerTrinkaus, H.H.TrinkausMantl, S.S.MantlCarius, R.R.CariusLoo, RogerRogerLooCaymax, MattyMattyCaymaxSchaefer, H.H.Schaefer2021-10-152021-10-152004-09https://imec-publications.be/handle/20.500.12860/8646Tensely strained silicon on SiGe produced by strain transferJournal article