Sayan, SafakSafakSayanChan, BTBTChanMarzook, TaisirTaisirMarzookVandenbroeck, NadiaNadiaVandenbroeckAltamirano Sanchez, EfrainEfrainAltamirano SanchezGronheid, RoelRoelGronheidSingh, ArjunArjunSinghRincon Delgadillo, PaulinaPaulinaRincon Delgadillo2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25867Directed self-assembly process integration – fin patterningProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1854371