Consistent analytical model for single and dual thickness capacitive micromachined ultrasound transducers (cMUT)

Rottenberg, XavierXavierRottenbergErismis, Mehmet AkifMehmet AkifErismisCzarnecki, PiotrPiotrCzarneckiHelin, PhilippePhilippeHelinVerbist, AgnesAgnesVerbistTilmans, HarrieHarrieTilmans2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21430Consistent analytical model for single and dual thickness capacitive micromachined ultrasound transducers (cMUT)Proceedings paper