Kunnen, EddyEddyKunnenUrbanowicz, AdamAdamUrbanowiczFranquet, AlexisAlexisFranquetShamiryan, DenisDenisShamiryanStruyf, HerbertHerbertStruyfBoullart, WernerWernerBoullartBaklanov, MikhaïlMikhaïlBaklanov2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15634Effect of energetic ions on plasma damage of SiCOH low-k materialProceedings paper