Bearda, TwanTwanBeardaMertens, PaulPaulMertensHolsteyns, FrankFrankHolsteynsDe Bisschop, PeterPeterDe BisschopCompen, R.R.Compenvan Meer, A.A.van MeerHeyns, MarcMarcHeyns2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10070The impact of backside particles on the limits of optical lithographyProceedings paper