Dummy gate amorphous silicon CMP using in-situ profile CLC endpoint system for advanced FinFET

Tsvetanova, DianaDianaTsvetanovaIizumi, TakeshiTakeshiIizumiIto, BanBanItoRoyere, GaelGaelRoyereDurix, FabienFabienDurixDevriendt, KatiaKatiaDevriendtOng, PatrickPatrickOngStruyf, HerbertHerbertStruyf2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29606Dummy gate amorphous silicon CMP using in-situ profile CLC endpoint system for advanced FinFETProceedings paper