Novel applications of ellipsometry and solvent probes for characterising Cu/low-K dielectric materials for advanced semiconductor interconnects

Shamiryan, DenisDenisShamiryan2021-10-152021-10-152004-01https://imec-publications.be/handle/20.500.12860/9585Novel applications of ellipsometry and solvent probes for characterising Cu/low-K dielectric materials for advanced semiconductor interconnectsPHD thesis