van Spengen, MerlijnMerlijnvan SpengenPuers, BobBobPuersMertens, RobertRobertMertensDe Wolf, IngridIngridDe Wolf2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6963Experimental characterization of stiction due to charging in RF MEMSProceedings paper