Tilmans, HarrieHarrieTilmansDe Raedt, WalterWalterDe RaedtBeyne, EricEricBeyne2021-10-152021-10-152003-06https://imec-publications.be/handle/20.500.12860/8216MEMS for wireless communications: "from RF-MEMS components to RF-MEMS-SiP"Journal article