De Coster, WalterWalterDe CosterBrijs, BertBertBrijsDeleu, JeroenJeroenDeleuAlay, Josep LluisJosep LluisAlayVandervorst, WilfriedWilfriedVandervorst2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1157In situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materialsJournal article