Low-frequency noise behavior in p-channel SOI FinFETs processed with different strain techniques

Guo, W.W.GuoTalmat, R.R.TalmatCretu, B.B.CretuRoutoure, J.M.J.M.RoutoureCarin, R.R.CarinMercha, AbdelkarimAbdelkarimMerchaSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15404Low-frequency noise behavior in p-channel SOI FinFETs processed with different strain techniquesProceedings paper