Paolillo, SaraSaraPaolilloLazzarino, FredericFredericLazzarinoRassoul, NouredineNouredineRassoulWan, DannyDannyWanPiumi, DanieleDanielePiumiTokei, ZsoltZsoltTokei2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29142Direct metal etch evaluation for advanced interconnectProceedings paperhttp://www2.avs.org/symposium2017/Papers/Paper_PS-WeM2.html