Understanding the significance of local variability in defect-aware process windows

Maslow, Mark JohnMark JohnMaslowYaegashi, HidetamiHidetamiYaegashiFrommhold, AndreasAndreasFrommholdHara, ArisaArisaHaraCerbu, DorinDorinCerbu2021-10-292021-10-2920200894-6507https://imec-publications.be/handle/20.500.12860/35557Understanding the significance of local variability in defect-aware process windowsJournal articlehttps://ieeexplore.ieee.org/document/8935432