Post processing of a SiNy-based photonic stack above a CMOS imager sensor

Pham, NgaNgaPhamTyagi, Hemant KumarHemant KumarTyagiDu Bois, BertBertDu BoisVan Hoof, RitaRitaVan HoofWinderickx, GillisGillisWinderickxSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanTilmans, HarrieHarrieTilmans2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31522Post processing of a SiNy-based photonic stack above a CMOS imager sensorProceedings paperhttps://ieeexplore.ieee.org/document/8654381