Low frequency direct-PECVD SiNx films for rear surface passivation

De Wolf, StefaanStefaanDe WolfAgostinelli, GuidoGuidoAgostinelliBeaucarne, GuyGuyBeaucarneVitanov, P.P.Vitanov2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8807Low frequency direct-PECVD SiNx films for rear surface passivationOral presentation