Nanoindentation methodologies for characterizing thin (porous) low dielectric constant materials and copper pads

Okudur, Oguzhan OrkutOguzhan OrkutOkudur2021-10-292021-10-292020-02https://imec-publications.be/handle/20.500.12860/35668Nanoindentation methodologies for characterizing thin (porous) low dielectric constant materials and copper padsPHD thesishttps://lirias.kuleuven.be/2912891?limo=0