Low-frequency noise in vertically stacked Si n-channel nanosheet FETs

Oliveira, AlbertoAlbertoOliveiraVeloso, AnabelaAnabelaVelosoClaeys, CoCoClaeysHoriguchi, NaotoNaotoHoriguchiSimoen, EddyEddySimoen2021-10-292021-10-2920200741-3106https://imec-publications.be/handle/20.500.12860/35670Low-frequency noise in vertically stacked Si n-channel nanosheet FETsJournal articlehttps://ieeexplore.ieee.org/document/8963943