Sidewall roughness in photonic crystal slabs: a comparison of high-contrast membranes and low-contrast III-V epitaxial structures

Bogaerts, WimWimBogaertsBienstman, P.P.BienstmanBaets, RoelRoelBaets2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7229Sidewall roughness in photonic crystal slabs: a comparison of high-contrast membranes and low-contrast III-V epitaxial structuresProceedings paper