Interface stability in advanced high-k-metal-gate stacks

Adelmann, ChristophChristophAdelmannFranquet, AlexisAlexisFranquetConard, ThierryThierryConardWitters, ThomasThomasWittersFerain, IsabelleIsabelleFerainMeersschaut, JohanJohanMeersschautJurczak, GosiaGosiaJurczakDe Meyer, KristinKristinDe MeyerKittl, JorgeJorgeKittlVan Elshocht, SvenSvenVan Elshocht2021-10-172021-10-1720091071-1023https://imec-publications.be/handle/20.500.12860/14866Interface stability in advanced high-k-metal-gate stacksJournal articlehttp://scitation.aip.org/vsearch/servlet/VerityServlet?KEY=JVTBD9&ONLINE=YES&smode=strresults&sort=chron&maxdisp=25&threshold=0&