Leroy, FlorianeFlorianeLeroyTillocher, ThomasThomasTillocherLefaucheux, PhilippePhilippeLefaucheuxDussart, RemiRemiDussartyatsuda, koichikoichiyatsudaMaekawa, KaoruKaoruMaekawaDussarat, ChristianChristianDussaratZhang, LipingLipingZhangde Marneffe, Jean-FrancoisJean-Francoisde MarneffeBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25533Cryoetching processes applied to ULK materialMeeting abstract