Direct measurement of top and sidewall interface trap density in SOI FinFETs

Kapila, GautamGautamKapilaKaczer, BenBenKaczerNackaerts, AxelAxelNackaertsCollaert, NadineNadineCollaertGroeseneken, GuidoGuidoGroeseneken2021-10-162021-10-162007-03https://imec-publications.be/handle/20.500.12860/12384Direct measurement of top and sidewall interface trap density in SOI FinFETsJournal article