van der Veen, MarleenMarleenvan der VeenVereecke, BartBartVereeckeHuyghebaert, CedricCedricHuyghebaertCott, DaireDaireCottMasahito, SugiuraSugiuraMasahitoKashiwagi, YusakuYusakuKashiwagiTeugels, LieveLieveTeugelsCaluwaerts, RudyRudyCaluwaertsChiodarelli, NicoloNicoloChiodarelliVereecken, PhilippePhilippeVereeckenBeyer, GeraldGeraldBeyerHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe GendtTokei, ZsoltZsoltTokei2021-10-212021-10-2120130167-9317https://imec-publications.be/handle/20.500.12860/23244Electrical characterization of CNT contacts with Cu damascene top contactJournal articlehttp://dx.doi.org/10.1016/j.mee.2012.09.004